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Sharp EL-6490 Manuel d'utilisateur Page 9

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9
High Brightness LaB6 Gun (Optional)
The LaB6 gun is easy to operate. Simply select the LaB6 on the
Gun alignment window. The LaB
6 filament is factory pre-centered in
the same way as the tungsten hairpin filament so that a user does
not have to center the filament.
The LaB
6 gun is brighter than the tungsten hairpin gun. The elec-
tron source of the LaB
6 gun is smaller so that a higher quality
image with better sharpness can be obtained. The improvement is
more significant at the lower accelerating voltages. The LaB
6 gun
has an advantage in the observation of fine surface structures.
The expected life is around 500 hours, which is approximately 5
times longer than that of the tungsten hairpin gun. The LaB
6 gun is
suitable for a study such as the automated particle or gun shot
residue analysis, which takes a long time.
The LaB
6 requires higher vacuum than the tungsten hairpin gun for
its stable operation. An ion pump is equipped on the gun chamber
to create a higher vacuum for the LaB
6 gun. The conventional tung-
sten hairpin gun can also be used in the gun chamber equipped
with the ion pump.
LaB6 Gun
Operation of the LaB
6
Gun
1µm
0.5µm
Yogurt bacteria 3kV Original magnification 25,000
Ceramic 10kV Original magnification 30,000
The window for selecting the LaB6 Gun
The ion pump and the gun valve for LaB
6
LaB
6
Tungsten hairpin
gun gun
Brightness 310
5
A/cm
2
sr 510
4
A/cm
2
sr
Size of electron source 10m 20m
Life of filament 300 to 500hours 50 to 100hours
Pressure in gun chamber
10
5
Pa 10
4
Pa
Comparison of LaB6 gun and Tungsten hairpin gun
Resolution 2.5nm (30kV)
7nm (3kV)
15nm (1kV)
Evacuation of gun chamber
Ion pump
Specimen exchange Stage door open
Specimen exchange
chamber (option)
LaB
6
filament Factory pre-centered
Principal specifications
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