Installation Layout (JSM-6490LV)
Backscattered electron detector*
1
Low vacuum secondary electron detector
Energy dispersive X-ray analyzer (EDS)
Wave length dispersive X-ray analyzer (WDS)
Electron Back Scatter Diffraction (EBSD)
Specimen exchange airlock chamber
Chamber scope
Operation knobs
Specimen cooling unit
LaB6 electron gun
Report creation software (SMile View)*
2
Operation console (750mm wide, 900mm wide, 1100mm wide)
Resolution HV mode 3.0 nm (30kV), 8.0 nm (3kV), 15 nm (1kV)
LV mode 4.0 nm (30kV)
Magnification 8 to 300,000 (at 11kV or higher)
5 to 300,000 (at 10kV or lower)
Preset magnifications 5 steps, user selectable
User operation recipe Optics, Specimen stage, Image mode,
LV pressure*
1
, Standard recipe
Image mode Secondary electron image,
Composition*
1
, Topography*
1
, Shadowed*
1
Accelerating voltage 0.3 kV to 30 kV
Filament Factory pre-centered filament
Electron gun Fully automated, manual override
Condenser lens Zoom condenser lens
Objective lens Super conical objective lens
Objective lens apertures 3 stages, XY fine adjustable
Stigmator memory Built in
Electrical image shift 50m (WD=10mm)
Auto functions Focus, brightness, contrast, stigmator
Specimen stage Large eucentric type,
X: 125mm, Y: 100mm, Z: 5mm to 80mm,
Tilt: 10 to 90, Rotation: 360
Motor control 5 axes computer controlled
Navigator/Reference 2 images
Specimen exchange Through the front door
Maximum specimen 200mm diameter
Computer IBM PC/AT compatible
OS Windows
®
XP
Monitor 15 inch LCD, 1 or 2*
2
Frame store 640 480, 1,280 960 pixels,
2,560 1,920 pixels
Full size image display Built in
Pseudo color Built in
Multi image display 2 images, 4 images
Digital zoom Built in
Dual magnification Built in
Network Ethernet
Image format BMP, TIFF, JPEG
Auto image archiving Built in
Smile View Built in*
2
Pumping system Fully automated, DP: 1, RP: 1 or 2*
1
Switching vacuum mode
*
1
Through the menu, less than 1 minute
LV Pressure*
1
1 to 270 Pa
JED-2300 EDS*
2
Built in
Principal Specifications
Principal Options
*
1
Standard on JSM-6490LA and JSM-6490LV
*
2
Standard on JSM-6490LA/JSM-6490A
*
Specifications subject to change without prior notice.
Power: Single-phase, 100V AC, 50/60Hz,
3.0kVA
Voltage regulation within
10%
(voltage drop at 3.0kVA within 3%)
Grounding terminal: One, 100 ohms or less
Cooling water:
Faucet:
One,14mm OD or
ISO 7/1 Rc 1/4 internal thread
Drain: One, 25mm or more ID, or
ISO 7/1 Rc 1/4 internal thread
Flow rate: 2L/min.
Pressure: 0.05 to 0.2 MPa
Temperature: 205C
Environment
Temperature:
205C
Humidity: 60% or less
Stay AC magnetic field:
0.3T or less
(50/60 Hz sine wave, WD:15mm, Acc.V.: 30kV)
Floor vibration: 2m(p-p) or less at sine wave of over 5Hz
frequency
Floor space: 2,000(W) 2,500(D) 1,800(H)mm or more
Weight Approx. 550kg (JSM-6490),
Approx. 575kg (JSM-6490LV)
Door width: 850mm or more
Installation Requirements
Windows is a registered trade mark of Microsoft
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